Workshop: Multifunctional ultrafast microprobes for on-the-machine measurements

23 June 2021, 13:00-15:30 CEST

Traceable measurements of surface form and property are essential for controlling the use of or assessing the condition of machined parts and tools in high precision mechanical manufacturing machines - especially when these components are subject to wear and surface contamination.

EMPIR project Multifunctional ultrafast microprobes for on-the-machine measurements (17IND05, MicroProbes) is working to develop new tactile microprobes for reliable and ultrafast, on-the-machine (i.e. in-line) topographical micro-form and roughness measurements. The microprobes are able to provide measurements 30 times faster than other, conventional and fast methods that use contact resonance and force-distance curves to measure adhesion, stiffness, friction, coating thickness and to detect contaminants through adhesion contrast. This workshop will present results from the project.

Workshop agenda

  • 13:00-13:15 Introduction to EMPIR project MicroProbes

Uwe Brand, PTB

  • 13:15-13:30 Mechanical properties measured with a customized microprobe for AFM

Sebastian Friedrich, BAM

  • 13:30-13:45 Contact resonance operation of piezoresistive microprobes

Michael Fahrbach and Erwin Peiner,  TUBS

  • 13:45-14:00 Fast topography measurements using optimized cantilevers with active Q-control and passive damping

Chris Schwalb, GETec

  • 14:00-14:15 Microprobe system with integrated ‘high-speed’ feed unit – Microprofiler

Benjamin Mall,  bmt

  • 14:15-14:30 In-line measurement of surface texture of rolls using microprobes

Thomas Widmaier RRI, Linus Teir VTT

  • 14:30-14:45 In situ measurement of wear using mechanical microprobes

Mark Gee, John Nunn, Timothy Kamps, Peter Woolliams NPL

  • 14:45-15:05 Conclusions of results and outlook

Uwe Brand, PTB

  • 15:05-15:30 Stakeholder comments & discussion

Uwe Brand, PTB

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This EMPIR project is co-funded by the European Union's Horizon 2020 research and innovation programme and the EMPIR Participating States.