European Materials Research Society (E-MRS) 2017 Fall Meeting


EMPIR project (14IND07 3D Stack) Metrology for manufacturing 3D stacked integrated circuits will develop traceable measurement capabilities for detecting structural and chemical defects in high aspect ratio TSVs, and new methods to accurately characterise thermal and electrical properties at the nanoscale.

Results from the project will be presented at the 2017 E-MRS Fall Meeting. E-MRS will feature 4 technical tracks and 23 symposia that span the three days of sessions on: energy storage; special materials; materials and devices; bio- and nanomaterials; as well as the interactive poster sessions.