A highly reproducible ionisation gauge for high vacuum environments
Many high-end industrial production processes, including semiconductor and solar cell manufacturing, utilise high (10-1-10-5 Pa) and ultra-high (10-5-10-10 Pa) vacuums. Instrumentation used in these areas, such as residual gas analysers and quadrupole mass spectrometers, require accurate calibration with ionisation gauges (IG)....
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